کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
738883 1461868 2015 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fabrication of single titanium oxide nanodot ultraviolet sensors by atomic force microscopy nanolithography
ترجمه فارسی عنوان
ساخت نانولیتوگرافی میکروسکوپ نیروی اتمی با استفاده از سنسورهای ماوراء بنفش نانوذرات اکسید تیتانیوم
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
چکیده انگلیسی


• Single titanium oxide nanodot ultraviolet sensors have been fabricated.
• Atomic force microscopy nanolithography is utilized for the fabrication.
• An ohmic and a Schottky contact sensors have been obtained.
• The ohmic contact sensor has a sensitivity of 0.25 and a reset time of 80.5 s.
• The Schottky contact sensor has a sensitivity of 320 and a reset time of 1.9 s.

We report on the fabrication of single titanium oxide nanodot (ND) ultraviolet sensors by atomic force microscopy (AFM) nanolithography. A single titanium nanowire is first fabricated by AFM nanomachining and gold contact electrodes are then created by photolithography. By subsequent AFM nano-oxidation, a single titanium oxide ND sensor is produced. Two types of ND sensors, namely ohmic contact and Schottky contact, have been obtained and the sensitivities are around 0.25 and 320, respectively, under ultraviolet illumination. The rise and the reset times of the Schottky contact sensor are also significantly faster.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 232, 1 August 2015, Pages 94–98
نویسندگان
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