Micromechanical high-doses radiation sensor with bossed membrane and interferometry optical detection

The silicon-glass MEMS high dose radiation sensor with the optical read-out, acting above 10 kGy has been presented. The sensor consists of a microchamber filled with small portion of high density polyethylene (HDPE) and thin silicon membrane. The principle of operation of the sensor is based on radiolysis effect of the HDPE which, upon radiation exposure, releases the hydrogen. The hydrogen increases the pressure inside the microchamber causing the deflection of the membrane, which is proportional to the pressure, thus to radiation dose. The sensor has been irradiated with high energy electron beam with dose 5 ÷ 40 kGy. The displacement of the membrane has been detected by optical interferometer. The relative generated pressure inside the sensor chamber has been found very high (up to 180 kPa). It shows that response of a micro-scaled MEMS sensor is much more effective in comparison to macro-scaled solutions.