کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
739033 894060 2007 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Post-processing techniques for locally self-assembled silicon nanowires
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Post-processing techniques for locally self-assembled silicon nanowires
چکیده انگلیسی

Post-processing techniques are applied after the integration and assembly of nanostructures and Microelectromechanical Systems (MEMS) to realize integrated Nanoelectromechanical Systems (NEMS). Experimentation is focused specifically on the application of post-processing steps to a locally self-assembled micro-to-nano system comprising of suspended silicon nanowires between two MEMS bridges. Local contact metallization, global metallization for rapid system functionalization and the application of aqueous treatment to the NEMS are among the post-processing techniques studied. These techniques are evaluated for their effectiveness and compatibility with integrated NEMS and traditional MEMS processes. It is found that local and global contact metallization techniques effectively alleviate inherent problems at the nano-to-micro contact and the aqueous treatment study confirms the effectiveness of the super critical drying process for nanostructures.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 135, Issue 1, 30 March 2007, Pages 10–15
نویسندگان
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