Electrostatic and mechanical characterization of 3-D micro-wineglass resonators

• Two interchangeable modes of excitation are demonstrated for testing of 3D micro-wineglass resonators.
• Mechanical testing consists of pinging using a piezo actuated probe assembly and optical pickoff via laser Doppler vibrometry.
• Electrostatic transduction is provided by assembled electrode structures fabricated using silicon on insulator (SOI) technology.
• 3-D micro-glassblown wineglass resonators were used for demonstration of characterization methods.

In this paper, we present methods for characterization of 3-D micro-wineglass resonators. Two interchangeable modes of excitation are demonstrated: (1) Mechanical pinging using a piezo actuated probe assembly and (2) electrostatic excitation using assembled electrode structures. Two interchangeable modes of detection are also presented: optical pick-up using laser Doppler vibrometry and capacitive detection. 3-D micro-glassblown wineglass resonators were used to demonstrate the characterization methods in this paper. Electrostatic excitation was used to obtain the frequency response of micro-glassblown resonators showing a Q-factor of 40.000 at 14.8 kHz, whereas piezo-pinging was used to obtain the time domain response of the resonators.