An electrostatic actuator for dual-axis micro-mechanical probe on friction force microscope

A dual-axis friction force microscope (FFM) probe with an electrostatic actuator has been developed. This actuator can modulate the sliding speed of the probe. A micro-drive part and the probe part were separately fabricated by anisotropic chemical etching and then combined using micro concave–convex alignment structures. This resulted in 10-μm-order gaps between electrodes of the probe and drive parts and could provide a sufficient electrostatic force. The laterally vibrated probe demonstrated the evaluation of the local rheological properties of the 1.9-nm-thick liquid lubricant film patterned in a 10-μm wide line and space pattern. A dual-axis micro-mechanical probe with this electrostatic actuator can be used to clarify local tribological and rheological properties.