Characteristics of thermal distortions of the laser mirror substrates filled with phase-change materials

Under irradiating of the laser power of 2 kW, the thermal deformations of the silicon mirror substrates with phase change materials are experimentally measured and numerically analyzed by using finite element methods, respectively. The experimental results show that when the absorbed laser power is 120 W and the laser irradiating time gets to three seconds, the thermal distortion of the silicon mirror substrates with paraffin/carbon powder is 0.25 μm, that of the paraffin/aluminum powder 0.33 μm, and that of the paraffin/copper powder 0.37 μm. The numerical calculation coincides with the experimental results.