کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
740237 894153 2010 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A simple numerical method to study the far-field diffraction of optical MEMS devices with a large array and complex element geometry
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
A simple numerical method to study the far-field diffraction of optical MEMS devices with a large array and complex element geometry
چکیده انگلیسی

A simple numerical method based on MATLAB (The MathWorks, Inc.) is presented for studying the far-field diffraction of some optical MEMS devices with a large array and complex element geometry. The method avoids the theoretical solution by defining the working surfaces according to different apertures. Through a practical example of a grating optical modulator, the experimental tests are in good agreement with the simulation performed by using the proposed method. Then, some other optical MEMS devices with different structure configurations are also simulated. All these results reveal that the method proposed is efficient and effective, yet easy to operate. It is extremely suitable for simulating and analyzing such optical MEMS devices with planar reflective or transmissive optical working surfaces.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 158, Issue 1, March 2010, Pages 30–36
نویسندگان
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