A micro heater platform with fluid channels for testing micro-solid oxide fuel cell components

Micro-scale solid oxide fuel cells (μ-SOFCs) constitute a promising power generation technology for portable devices such as aerospace exploration, medical devices and consumer electronics. Fuel cell systems include several functional units providing gas reforming, electrochemical power generation, and post-combustion of unused fuel. All such units require operation at controlled temperature with appropriate gases. Although various μ-SOFC components have been demonstrated, the evaluation of the thermal balance is cumbersome, as there is no micro platform providing thermal insulation, controlled heating, temperature control, and gas exchange. Our testing platform is designed for this purpose. It consists of two sealed glass substrates with integrated platinum thermistors for heating and temperature control, and channels to supply and evacuate gases. Its fabrication is compatible with silicon chip bonding. The heating elements are thick-film platinum thermistors allowing to heat up to 700 °C. Efficient thermal decoupling along the carrier allows convenient low-temperature electrical and fluidic connections. A fluidic MEMS module – a prototype gas reformer – was bonded onto the carrier to demonstrate tight gas connections at elevated temperature.