Fast dew point hygrometer with silicon integrated detector—Optimization of dynamic properties

Some biomedical applications require fast and accurate humidity measurements. These requirements can be met by dew point hygrometers with both special construction and special algorithm of temperature control for dew detection. The hygrometer construction described in the paper is based on integrated semiconductor structure combining the impedance dew detector, the thermoresistor and the heater. An adaptive type algorithms with number of dew detections per minute, minimal temperature over-regulations and low power consumption as a criterions for optimization have been designed to control the detector temperature. Finally, experimental results of optimal heater and Peltier couple currents set up for fast dew point temperature measurements are discussed in the report.