Development of process for far infrared sensor fabrication

The production of bolometers involves various processes. Those which are most likely to interfere with the operation of the sensors are the depositon of the porous gold (gold-black) layer used as an infrared absorber and the poly-Si etching used to form resistive devices. In this paper, we present an appropriate process for the deposition of porous gold for far-infrared detection, and provide a comparison of wet and plasma etching of poly-Si.