A shear stress sensor for tactile sensing with the piezoresistive cantilever standing in elastic material

In this paper, we propose a tactile sensor with standing piezoresistive cantilevers embedded in an elastic material. The sensor detects the shear stress applied on its surface. Each standing piezoresistive cantilever in the elastic material detects a certain axial component of applied shear stress. By arranging this standing piezoresistive cantilever in orthogonal directions, the directions and the magnitudes of applied shear stress is detected. The efficiency of this sensor was confirmed in the range of −5.0 to 5.0 kPa. We measured the 2.45 kPa shear stress applied to this sensor from several directions and confirmed that the sensor has a high accuracy for the shear stress detection.