Alumina MEMS platform for impulse semiconductor and IR optic gas sensors

In this paper, we discuss the use of a novel ceramic MEMS (CeraMEMS) technology based on the application of thin alumina film (TAF). The membrane is fabricated by the electrolyte spark oxidation of aluminum, consists of nano-crystalline γ-aluminum oxide, and has a thickness of 10–30 μm. The MEMS chip is formed by the fixation of the membrane on alumina ceramic substrate with holes. The MEMS platform demonstrates very high stability at working temperatures up to 600 °C (life time >5 years, drift of heater resistance ∼3% per year at 550 °C). It was shown that this membrane chip could be used for the fabrication of gas sensors (semiconductor, thermocatalytic, and NDIR optic) operating in impulse regime. The thermal response time of the heater is of about 80 ms, the chip remains working after 7 millions on–off cycles at 450 °C. Average power consumption of methane sensors based on these platforms is <1 mW. This low power consumption enables the application of CeraMEMS sensors in wireless networks.