CMOS microsystems temperature control

Here we describe a high-accuracy, high-precision interface for the temperature control of a microsystem which contains a bipolar junction transistor for temperature sensing; the desired temperature is set by a digital word and the interface may be integrated in standard CMOS processes. Transistor level simulations of the complete electro-thermal microsystem show that, after a single temperature calibration, the temperature control error may be kept below ±0.1 °C in the temperature range (0 °C–102.4 °C).