Al2O3-coated microcantilevers for detection of moisture at ppm level

We have demonstrated that the Al2O3-modified microcantilevers (MCLs) can be used to detect low level of moisture. The detection limit for moisture in nitrogen was 10 ppm. The MCLs’ response time to moisture was less than 3 min. The sensors were stable for months stored under ambient conditions. The bending amplitudes were proportional to the moisture level and temperature, and the detection of moisture was not affected by alcohols in the environment.