SnO2:Sb – A new material for high-temperature MEMS heater applications: Performance and limitations

MEMS micro heater devices capable of long-term operation at temperatures up to 1000 °C are presented. The enhanced long-term stability has been achieved by employing antimony-doped tin oxide (SnO2:Sb) as a substitute for the conventionally used noble metal heater resistors. A detailed investigation of its high-temperature stability reveals that degradation is caused by out-diffusion of Sb impurities from the SnO2 film.