High resolution scanning microanalysis on material surfaces using UV femtosecond laser induced breakdown spectroscopy

• Lateral resolution of ~1 μm obtained using LIBS.
• Excitation with UV fs pulses and micron wide Cr films were used as targets.
• 15× reflective objective produced micro-crater with detectable LIBS signal.
• LIBS scanning across metal strips and estimated Cr film width from LIBS signal.

Femtosecond lasers together with high resolution optics have given us the ability to achieve submicron ablation spots which can play an important role in specific micromachining applications. Light emitted from the plasma at the sample surface created by a focused femtosecond laser pulse can also be used in laser induced breakdown spectroscopy (LIBS) and allows us to characterize the chemical composition of the target surface with micron-level lateral resolution. The spatial resolution using LIBS has often been defined by measuring the FWHM of the crater size. In this report, we study the application of femtosecond 266 nm laser pulses with very low energies of 10׳s of nanojoules. We have investigated spatial resolution using the detection of thin strips of chromium on silicon substrates and compared the actual width of the chromium versus the experimentally obtained width using LIBS detection. The variation of signal levels for low pulse energies is investigated on chromium surfaces. A spatial resolution of ~1 μm was obtained for detection of chromium from the emission.