کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
743688 894367 2012 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Geometrical considerations for the design of liquid-phase biochemical sensors using a cantilever's fundamental in-plane mode
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
Geometrical considerations for the design of liquid-phase biochemical sensors using a cantilever's fundamental in-plane mode
چکیده انگلیسی

The influence of the beam geometry on the quality factor and resonance frequency of resonant silicon cantilever beams vibrating in their fundamental in-plane flexural mode in water has been investigated. Compared to cantilevers vibrating in their first out-of-plane flexural mode, utilizing the in-plane mode results in reduced damping and reduced mass loading by the surrounding fluid. Quality factors as high as 86 have been measured in water for cantilevers with a 20 μm thick silicon layer. Based on the experimental data, design guidelines are established for beam dimensions that ensure maximal Q-factors and minimal mass loading by the surrounding fluid, thus improving the limit-of-detection of mass-sensitive biochemical sensors. Elementary theory is also presented to help explain the observed trends. Additional discussion focuses on the tradeoffs that exist in designing liquid-phase biochemical sensors using in-plane cantilevers.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volume 164, Issue 1, 31 March 2012, Pages 7–14
نویسندگان
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