کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
743901 894374 2008 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Composite porous silicon-crystalline silicon cantilevers for enhanced biosensing
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
Composite porous silicon-crystalline silicon cantilevers for enhanced biosensing
چکیده انگلیسی

Cantilever transducers, which are recognized as a promising platform for the next generation of chemical and biological sensors, are currently under extensive research. Here we report composite porous silicon-crystalline silicon microcantilevers made of SOI wafers, where the porous silicon surface provides an excellent interface for immobilization of the biosensing layer. We start with crystalline silicon cantilevers fabricated from SOI wafers and we establish a surface layer of porous silicon on the cantilevers by vapor phase stain etching. The processed porous silicon does not introduce significant static bending of the cantilevers indicating that it does not introduce significant residual stress. It does provide an excellent biocompatible material for immobilization of a wide variety of chemical and biological materials, resulting in enhanced sensitivity as demonstrated on the covalently immobilized antibody binding its complementary antigen.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volume 131, Issue 2, 14 May 2008, Pages 509–515
نویسندگان
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