کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
744684 894399 2012 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Physical spherical phase compensation in reflection digital holographic microscopy
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Physical spherical phase compensation in reflection digital holographic microscopy
چکیده انگلیسی

Reflection configured digital holographic microscopy (DHM) can perform accurate optical topography measurements of reflecting objects, such as MEMs, MOEMs, and semiconductor wafer. It can provide non-destructive quantitative measurements of surface roughness and geometric pattern characterization with nanometric axial resolution in real-time. However, the measurement results may be affected by an additional phase curvature introduced by the microscope objective (MO) used in DHM. It needs to be removed either by numerical compensation or by physical compensation.We present a method of physical spherical phase compensation for reflection DHM in the Michelson configuration. In the object arm, collimated light is used for illumination. Due to the use of the MO, the object wavefront may have a spherical phase curvature. In the reference arm, a lens and mirror combination is used to generate a spherical recording reference wave in order to physically compensate the spherical phase curvature of the object wavefront. By controlling the position of the mirror and the sample stage, the compensation process has been demonstrated. The relative positions of the test specimen and the reference mirror must be fixed for the physical spherical phase to be totally compensated. A numerical plane reference wave is preferred for the numerical reconstruction of the phase introduced by the test specimen. Experimental results on wafer pattern recognition are also given.


► Experimental study of physical spherical phase compensation in reflection digital holographic microscopy.
► Spherical recording reference wave is used in order to physically compensated the spherical phase curvature of the object wavefront due to the use of microscope objective.
► Experimental calibration of the reflection digital holographic microscope and test results are given.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics and Lasers in Engineering - Volume 50, Issue 4, April 2012, Pages 563–567
نویسندگان
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