A highly sensitive microsystem based on nanomechanical biosensors for genomics applications

Microcantilever-based biosensors are a promising tool to detect biomolecular interactions in a direct way with high accuracy. We show the development of a portable biosensor microsystem able to detect nucleic acid hybridization with high sensitivity. The microsystem comprises an array of 20 micromechanical cantilevers produced in silicon technology, a polymer microfluidic system for delivery of the samples, an array of 20 vertical cavity surface emitting lasers (VCSELs) with collimated beams thanks to an integrated microlens array, an optical coupling element to provide the optical path required, and chips with the photodetectors and the CMOS circuitry for signal acquisition and conditioning, capable of measuring the cantilever deflection with sub-nanometer resolution. Robust immobilization and regeneration procedures have been implemented for the oligonucleotide receptor sequences. In a further innovation, an optical waveguide cantilever transducer has been also developed in order to improve the final performance of the device. This has a number of advantages in terms of a simple optical geometry and improved sensitivity.