Tungsten trioxide sensing layers on highly ordered nanoporous alumina template

The gas sensing properties of WO3 thin films deposited on highly ordered nanoporous alumina templates were studied. WO3 films were prepared by rf sputtering of a tungsten target in a mixture of Ar and O2. The WO3-based sensors were selective to NO2, NH3 and ethanol at the temperature range from 150 to 300 °C. A mechanism of the influence of the nanoporous template on the response of the sensing film is discussed.