Integrated high temperature gas sensor system based on bulk acoustic wave resonators

A high temperature gas sensor system based on bulk acoustic wave resonators is developed. The system consists of CeO2 coated langasite resonators with a special electrode design to detect mechanical and conductivity changes in the sensor film. The data acquisition is performed using a specialized compact impedance analyser and a data processing software using methods of computational intelligence. The system is tested in different atmospheres containing mixtures of CO and H2 and exhibits selectivity to these gases.