کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
745805 | 894433 | 2008 | 5 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Wet release of multipolymeric structures with a nanoscale release layer Wet release of multipolymeric structures with a nanoscale release layer](/preview/png/745805.png)
A promising wet release process using OmniCoat™ [1] has been developed for the release of the multilayer microsensor device that is being used for biomedical applications. OmniCoat™ has high thermal stability (Tg ∼190 °C) which makes it compatible with high temperature processes. A multilayer fabrication approach and OmniCoat™ release layer was successfully integrated for a microsensor device to be released from the substrate. Thickness and release rate of OmniCoat™ release layer was investigated. The effects of OmniCoat™ development on the optical properties of SU-8 were analyzed. Highly aligned structures and good adhesion between metals and cured polymer layers have been achieved. OmniCoat™ as a release layer has great potential in several other MEMS applications where SU-8 is used as a structural material.
Journal: Sensors and Actuators B: Chemical - Volume 132, Issue 2, 16 June 2008, Pages 426–430