کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
746558 | 894463 | 2008 | 8 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Microscopic TV holography for MEMS deflection and 3-D surface profile characterization Microscopic TV holography for MEMS deflection and 3-D surface profile characterization](/preview/png/746558.png)
Recent industrial demands for greater product quality in the fields of microelements and micro-electro-mechanical systems (MEMS) generate new challenges for metrology. The fast-growing MEMS industry requires a robust non-destructive quantitative measurement system for the characterization of their performance, reliability and integrity. A microscopic TV holographic system using a long working distance microscope with an extended zoom range has been developed for microelements and MEMS deformation and 3-D surface profile analysis. The system is capable of evaluating both rough and smooth surfaces. Noisy wrapped phase map is a usual problem in speckle interferometry. We have compared several phase-shifting algorithms for evaluation of speckle phase for their usefulness in generating less-noisy phase maps. The experimental results on a MEMS pressure sensor for out-of-plane deflection and 3-D surface profile analysis are presented.
Journal: Optics and Lasers in Engineering - Volume 46, Issue 9, September 2008, Pages 687–694