کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
746744 | 894475 | 2007 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Gas sensing properties of WO3 thin films deposited by rf sputtering
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Gas sensing properties of WO3 thin films deposited by rf sputtering Gas sensing properties of WO3 thin films deposited by rf sputtering](/preview/png/746744.png)
چکیده انگلیسی
WO3 thin films were deposited by reactive radio frequency (rf) sputtering from a pure tungsten target. The deposition process was conducted with three interruptions and the interruption time was 30, 90 and 300 s. On the basis of these films, sensing layers were prepared and their responses to NO2, ammonia and ethanol were investigated. It was found that the sensing layers prepared with an interruption time of more than 90 s showed the best sensing properties.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volume 126, Issue 2, 1 October 2007, Pages 400–405
Journal: Sensors and Actuators B: Chemical - Volume 126, Issue 2, 1 October 2007, Pages 400–405
نویسندگان
Viacheslav Khatko, Stella Vallejos, Josep Calderer, Eduard Llobet, Xavier Vilanova, Xavier Correig,