Micro-Raman analysis on LiNbO3 substrates and surfaces: Compositional homogeneity and effects of etching and polishing processes on structural properties

In this work we report on micro-Raman analysis on lithium niobate (LN) substrates in order to study the compositional homogeneity of the crystals and to clear up the effects of etching and polishing processes on the surface of wafers and crystals.The fact that the linewidth of some Raman modes scale with the composition of LN crystals, together with the use of a confocal microscope, allowed a three-dimensional determination of the sample stoichiometry and of the crystalline quality. This local tool can supply additional information, which can be complementary to the electro-optic coefficients, carefully measured as well in order to check functional parameters.Raman spectra from buried regions were obtained on as-grown, etched and polished crystals and wafers. The depth profile of the peak energy and the linewidth of the Raman mode at 872 cm−1 indicate that mechanical processing of surfaces causes, in some cases, structural modifications till a depth of 15 μm.