کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
749208 | 894815 | 2010 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Organic thin film transistors on flexible polyimide substrates fabricated by full-wafer stencil lithography
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Organic thin film transistors on flexible polyimide substrates fabricated by full-wafer stencil lithography Organic thin film transistors on flexible polyimide substrates fabricated by full-wafer stencil lithography](/preview/png/749208.png)
چکیده انگلیسی
This paper presents new results on miniaturized pentacene thin film transistors (TFTs) fabricated on a spin coated polyimide (PI) film. Patterning steps, which are vital for the integrity and electrical performance of organic TFTs, were done using resistless shadow-mask lithography with two high precision MEMS fabricated stencils, thus avoiding solvents and high temperature processes. Both pentacene and source–drain (S/D) electrodes were directly patterned through stencils with high accuracy on wafer scale. The TFTs have been characterized before and after peeling the flexible PI film off the rigid surface, showing full transistor functionality in both cases.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 162, Issue 2, August 2010, Pages 155–159
Journal: Sensors and Actuators A: Physical - Volume 162, Issue 2, August 2010, Pages 155–159
نویسندگان
Katrin Sidler, Nenad V. Cvetkovic, Veronica Savu, Dimitrios Tsamados, Adrian M. Ionescu, Juergen Brugger,