کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
749231 | 894815 | 2010 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication and packaging technologies of Love-wave-based microbalance for fluid analysis
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Fabrication and packaging technologies of Love-wave-based microbalance for fluid analysis Fabrication and packaging technologies of Love-wave-based microbalance for fluid analysis](/preview/png/749231.png)
چکیده انگلیسی
Sensors able to operate with liquid phases are the key-point for the development of biochemical lab-on-chip devices. In this work, we present the design and manufacture of Love-wave sensors equipped with a liquid cell, at the wafer scale level, to allow operation with liquid media. Love-wave sensors are fabricated on AT-cut quartz plates (IEEE Std-176 notation (YXlt)/36/90) and passivated by a 2.5 μm thick silica overlay. The fabrication process using the celebrated SU-8 epoxy-based photoresist combined with silicon or quartz machined covers is presented, revealing robust enough for ensuring a reproducible sensor fabrication and packaging. Results are reported emphasizing the efficiency of the proposed approach.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 162, Issue 2, August 2010, Pages 304–309
Journal: Sensors and Actuators A: Physical - Volume 162, Issue 2, August 2010, Pages 304–309
نویسندگان
L. El Fissi, J.-M. Friedt, F. Chérioux, V. Luzet, S. Ballandras,