کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
749235 894815 2010 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Numerical and experimental investigation on contactless resonant sensors
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Numerical and experimental investigation on contactless resonant sensors
چکیده انگلیسی

This paper reports numerical and experimental investigation on a (bulk and etch silicon on insulator) BESOI MEMS device. The implemented contactless actuation principle, exploits Lorentz forces exerted on a conductive-non magnetic surface of the sensor. These forces derive from the interaction between the eddy-currents and the radial magnetic field, both generated by a sinusoidally driven external inductor. Both excitation and readout strategies are performed remotely via a magnetic strategy. The sensor proposed here has been first analytically and numerically studied by using CoventorWare™ 2008, then the device prototype has been fabricated and a preliminary experimental campaign has been performed to characterize the system in terms of variation of its resonance frequency against changes in the sensor mass.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 162, Issue 2, August 2010, Pages 329–335
نویسندگان
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