کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
749249 894816 2010 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Ultraprecision 3D probing system based on spherical capacitive plate
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Ultraprecision 3D probing system based on spherical capacitive plate
چکیده انگلیسی

In order to make ultraprecision dimensional and profile measurement of small structures with large aspect ratio possible, a 3D probing system based on a spherical capacitive plate is proposed for use in making 3D non-contact probing at nanometer resolution. A spherical capacitive plate with identical sensing characteristic in any arbitrary spatial direction is used to convert the micro gap between the plate and the part being measured into a capacitive signal. Most of the electric lines of force of the spherical capacitive plate concentrate within a small region between the plate and the part being measured, so that the properties of 3D non-contact probing, isotropy characteristics, approximate point sensing and measurability of small structures with large aspect ratio are effectively combined in one probing system. Experimental results indicate that when a 3 mm probing head is used, the probing system has a resolution of better than 5 nm. With nonlinearity corrected, the residual nonlinear error is less than 10 nm in the full-range. The proposed system can therefore be used for submicron measurement of small structures with dimension larger than 3 mm and depth down to 100 mm.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 159, Issue 1, April 2010, Pages 1–6
نویسندگان
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