کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
749406 | 894826 | 2009 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
An optically interrogated microgyroscope using an out-of-plane lamellar grating
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
This paper describes the design and principle behind the demonstrated novel lamellar grating out-of-plane gyroscope design. The sensing mechanism is based on out-of-plane motion of movable light-reflecting beams changing the phase relationship between the light reflected off the two sets of beams. This phase relationship is manifested as an intensity change in the zeroth-order diffracted light. The device consists of two in-plane 180° out-of-phase vibrating masses with a set of overlapping light-reflecting beams behaving essentially as a lamellar grating. The commercial SOI-MUMPS process was used to fabricate a prototype. The gyroscope demonstrated a sensitivity of 17.8 μV/(°/s) and linearity error of less than 0.6%. Design issues were addressed and show promise to be overcome. Post-fabrication tuning and better optics design can improve the performance greatly with respect to the current prototype setup.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 154, Issue 2, 24 September 2009, Pages 269-274
Journal: Sensors and Actuators A: Physical - Volume 154, Issue 2, 24 September 2009, Pages 269-274
نویسندگان
Guangya Zhou, Kelvin K.L. Cheo, Yu Du, Fook Siong Chau,