کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
749954 | 894861 | 2007 | 6 صفحه PDF | دانلود رایگان |

Novel piezoelectric MEMS resonators with magnetic shielding have been developed to mechanically generate RF magnetic fields in the megahertz frequency range from static magnetic fields. Thermally evaporated thin film nickel iron (NiFe) (10–20 nm) was deposited with a saturation flux density of 0.5 T, coercivity of 500 A/m and a high relative permeability of 3.7 × 103. Aluminum nitride (AlN) resonators developed for high frequency operation, resonate in a contour mode to increase and decrease a gap surrounding the resonator. This gap, 200–350 nm, is formed using an amorphous silicon sidewall deposition as a sacrificial spacer. Resonators with frequencies up to 60 MHz have been fabricated and tested with design improvements to increase planarity.
Journal: Sensors and Actuators A: Physical - Volume 134, Issue 1, 28 February 2007, Pages 239–244