کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
749954 894861 2007 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Design of nano-gap piezoelectric resonators for mechanical RF magnetic field modulation
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Design of nano-gap piezoelectric resonators for mechanical RF magnetic field modulation
چکیده انگلیسی

Novel piezoelectric MEMS resonators with magnetic shielding have been developed to mechanically generate RF magnetic fields in the megahertz frequency range from static magnetic fields. Thermally evaporated thin film nickel iron (NiFe) (10–20 nm) was deposited with a saturation flux density of 0.5 T, coercivity of 500 A/m and a high relative permeability of 3.7 × 103. Aluminum nitride (AlN) resonators developed for high frequency operation, resonate in a contour mode to increase and decrease a gap surrounding the resonator. This gap, 200–350 nm, is formed using an amorphous silicon sidewall deposition as a sacrificial spacer. Resonators with frequencies up to 60 MHz have been fabricated and tested with design improvements to increase planarity.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 134, Issue 1, 28 February 2007, Pages 239–244
نویسندگان
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