Distortion optimized focusing mirror device with large aperture

A new concept of a MOEMS based active focusing device has been developed. The device consists of an electrostatically driven membrane-mirror with almost perfect parabolic shape over a very large area and a ring shaped counter electrode, which is part of the chip package. The device has been optimized for a parabolic deflection shape over a large surface area by coupled field FEM simulation. Using SOI-technology, the realization of stress free membranes with a diameter up to 10 mm has been proven. The device can be used in active optical applications where large numerical apertures are needed. Potential applications are e.g. confocal microscopy or scanning applications for focus control.