کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
750119 1461935 2006 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A new capacitive displacement sensor with high accuracy and long-range
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
A new capacitive displacement sensor with high accuracy and long-range
چکیده انگلیسی

A new capacitive displacement sensor is designed and fabricated for measurement of a large displacement with very high accuracy. This sensor is a kind of linear encoder with an array of microelectrodes made by micromachining processes. The two patterned electrodes on the sensor substrates are assembled facing each other after being coated with thin dielectric film. Due to the resulting small gap size, it is highly sensitive to displacement but minimizes expected misalignments such as tilting error. The sensor fabricated as a sample has a grating of electrodes with a width of 20 μm which is coated with a diamond-like carbon (DLC) film 0.4 μm thick. The proposed sensor was tested to conclude that its resolution is 0.9 nm for the measuring range of 15 mm and that the linearity error is expected to be less than 0.0026% of the measurable range.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volumes 130–131, 14 August 2006, Pages 135–141
نویسندگان
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