کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
750123 1461935 2006 10 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Micromachined integrated shock protection for MEMS
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Micromachined integrated shock protection for MEMS
چکیده انگلیسی

This paper reports the design and analysis of two concepts for shock protection of MEMS using nonlinear springs and soft coatings. The two concepts (nonlinear springs and soft coatings) could improve shock protection by reducing the secondary impact of a moveable MEMS device to shocks stops and by dissipating its energy in a reliable manner. We analyze the merits and demerits of each concept using simulation and ranges of shock design parameters are suggested to enhance performance. Simulations reveal that the nonlinear spring shock stops are capable of reducing impulses by over 90% while soft coatings may reduce impulses by 40%.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volumes 130–131, 14 August 2006, Pages 166–175
نویسندگان
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