کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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750151 | 1461935 | 2006 | 6 صفحه PDF | دانلود رایگان |

Ferrite thin-film RF integrated inductors using IC compatible processes are proposed and also demonstrated by experiments. Ferrites (Co-based, MnZn-based, NiZn-based and YFe garnet) for RF integrated inductors are investigated, and CoZrO ferrite shows the suitable high-frequency performance for RF applications. Various inductors with different kinds of ferrite thin-films have been fabricated using fully integrated processes. A typical inductor sample with COZrO thin-film is presented. The L and Q values of the sample are 2.05 nH and 20.5 at 2 GHz, respectively. The inductance is raised by 17% and the quality factor is raised by 41%, compared with the inductor, which doesn’t include ferrite thin-film. With the improvement of L and Q, the size of ferrite thin-film inductors can be reduced significantly.
Journal: Sensors and Actuators A: Physical - Volumes 130–131, 14 August 2006, Pages 365–370