Fabrication and characterization of a vertical lamination micromixer for mid-IR spectroscopy

A multilamination micromixer for time resolved infrared spectroscopy, optimized by fluid simulations is characterized by fluidic means for different flow rates. The mixer is fabricated with silicon micromachining techniques. Using four instead of two lamination layers yields a reduction of the diffusion length and decreases mixing time significantly. Measurement results show the ultrafast mixing performance of this micromixer (<1 ms for aqueous solutions) with high uniformity. An infrared measurement (mid-IR spectral range, 3–10 μm) proves the applicability of the device to monitor fast (bio)chemical reactions. The mixer operates in a high dynamic range enabling the investigation of a variety of chemical reaction kinetics in the time range of 10–300 ms. A high yield in fabrication is achieved due to well controlled processes. Easy chip handling and higher pressure durability is provided by a dedicated custom chip holder.