کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
751324 | 895225 | 2010 | 4 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Improved anti-stiction coating of SU-8 molds Improved anti-stiction coating of SU-8 molds](/preview/png/751324.png)
We have developed a simple method for the improved release of embossed poly(methyl methacrylate) (PMMA) as well as casted poly(dimethyl siloxane) (PDMS) from a SU-8 mold using vapor phase deposition of 1H,1H,2H,2H-Perfluorodecyltrichlorosilane (FDTS). We have further investigated if prior breakage of the epoxy groups by oxygen plasma or sulfuric acid improves the deposition of FDTS. The deposition of FDTS on acid-activated and untreated SU-8 gave an identical well performing anti-stiction coating, as opposed to oxygen plasma activated surface which resulted in a poor FDTS coverage. In this paper the method for the mold fabrication as well as the vapor phase deposition of FDTS onto the mold is described; examples of released final devices using this method in PMMA and PDMS are presented.
Journal: Sensors and Actuators B: Chemical - Volume 145, Issue 2, 19 March 2010, Pages 698–701