کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
751581 895242 2007 12 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
MEMS-based microelectrode system incorporating carbon nanotubes for ionization gas sensing
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
MEMS-based microelectrode system incorporating carbon nanotubes for ionization gas sensing
چکیده انگلیسی

A novel microelectrode system incorporating CNTs with some short gap sizes (S = 6, 7, 8, 10, 12 μm) that can generate non-thermal plasmas without high voltage operation and additional ionization sources is introduced in this paper. The characteristic current–voltage (I–V) and current–time (I–t) in the discharge process exhibit some self-protecting behaviors from the thermal plasma generation, which is similar to the dielectric barrier discharges. The threshold effects, which are sensitive to the gap size and gas species, definitely exist in the micro discharges in the electrode with a micrometer gap size and one-dimensional materials. As gas sensors that can monitor gas species and concentration at the atmospheric pressure, the sensitivity, selectivity and stability issues are tested. The results show the significantly improved performance, including the safe operation voltage (around 36 V), higher accuracy and selectivity, over the conventional device operated by the same principle. Furthermore, the device is facile to be realized using the microelectromechanical system (MEMS) fabrication technology, thanks to its chip-based nature. Additionally, the underlying physics are also under scrutiny in this paper in light of the fluid model of the discharge.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volume 127, Issue 2, 15 November 2007, Pages 637–648
نویسندگان
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