Development of a miniature time-of-flight mass/charge spectrometer for ion beam source analyzing

- A home-made miniature TOF MS for vacuum arc discharge ion source was developed.
- The miniature TOF MS is 413 mm × 250 mm × 414 mm and total weight is about 25 kg.
- The resolution is 600 and the detection range of ion kinetic energy is up to 102.
- The copper cathodic vacuum arc plasma was test, with Cu+, Cu2+ and Cu3+ dominating.