Dissociative electron attachment to the silane derivatives trichlorovinylsilane (SiCl3C2H3), tetravinylsilane (Si(C2H3)4) and trimethylvinylsilane (Si(CH3)3C2H3)

► DEA to selected vinylsilanes is studied in 0eV-12 eV electron energy range. ► Resonant structures in particular reaction channels are revealed. ► The influence of different functional groups is illuminated. ► Conclusions about the role of silicon bonding are given.