Negative ion formation through dissociative electron attachment to GeH4: Comparative studies with CH4 and SiH4

► Negative ion formation by low-energy electron impact to germane (GeH4) has been performed in an electron energy region from 6 to 11 eV with an energy resolution of ∼500 meV. ► Anion efficiency curves of four anions have been measured. ► Fragmentation into these negative ions is attributed to resonant dissociative electron attachment processes.