MEMS electrodynamic loudspeakers for mobile phones

This paper presents a MEMS structure of electrodynamic loudspeakers dedicated to mobile phone applications. The major goals are to obtain a high electroacoustic conversion efficiency and a high fidelity acoustic quality. The originalities lie in a rigid silicon membrane and in its suspension by a set of silicon beams. The moving coil is a planar copper microcoil electroplated on the silicon membrane whose microstructure was optimized for providing both rigidity and lightness of the mobile part.This paper presents different magnetic structures of the motor for this MEMS loudspeaker. These structures are ironless, only made out of permanent magnets which are bonded on the substrate. They are studied and optimized thanks to analytical formulations of the magnetic field created by the permanent magnets. Results are presented for a deep RIE etched 7.5 mm radius silicon membrane structured with 40 stiffening ribs and on a 30 μm thick microcoil with 35 turns.