A kinematics and experimental analysis of form error compensation in ultra-precision machining

Ultra-precision machining has drawn much attention and the error compensation is an essential issue for improving the accuracy of the machining process. However, the analysis of kinematics errors on the surface generation in ultra-precision machining has received relatively little attention. Ultra-precision machine can be represented as a multi-body system. Based on the theory of multi-body system, a kinematics model of two-axis ultra-precision machining system has been developed in the present study. Hence, a software error compensation method is incorporated which is carried out by modifying the idea tool path in the NC program. The modified NC program takes into account the kinematics error factors and so the actual tool path generation can be compensated for the kinematics errors on the machining of the surface of the workpiece. To verify the theoretical kinematics model and the error compensation method, a series of machining experiments have been conducted and the experimental results indicate that better surface quality was achieved with the implementation of the proposed compensation method.