کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
779068 1464592 2007 16 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی صنعتی و تولید
پیش نمایش صفحه اول مقاله
Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage
چکیده انگلیسی

This paper reports on a novel piezo-driven, parallel-kinematic, micropositioning XY stage. This monolithic design is comprised of parallelogram four-bar linkages, flexure hinges, and piezoelectric actuators. Kinematic and dynamic analysis shows that the mechanical structure of the stage has a large work space, high bandwidth and good linearity. The stage system was run in open-loop mode to measure the step response and frequency response. The results show that the resonation frequencies of the two vibration modes are 563 and 536 Hz and the damping ratios are 0.049 and 0.0228. Two fiber optic sensors were added to the system to build a closed-loop positioning system. Linear and circular contouring performance in closed-loop mode suggests high scanning performance for such parallel-kinematic stages. The positioning resolution of the stage, limited only by the feedback sensors used, is about 20 nm.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: International Journal of Machine Tools and Manufacture - Volume 47, Issue 6, May 2007, Pages 946–961
نویسندگان
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