کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
780482 | 1464519 | 2013 | 7 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Influence of the electrode distance and metal ion concentration on the resulting structure in electrochemical micromachining with structured counter electrodes Influence of the electrode distance and metal ion concentration on the resulting structure in electrochemical micromachining with structured counter electrodes](/preview/png/780482.png)
In this contribution a novel approach to Electrochemical Micro Machining (EMM), utilizing a structured counter-electrode with an integrated microfluidic channel, is presented. The process is capable of transferring numerous structures in parallel. The structure was defined by SU-8 photoresist. A 20μm high fluidic channel from the same material simultaneously acting as a spacer was applied on top of the electrode. During the structuring process, 3M NaNO3 was pumped through the channel and the applied current density was 100 A/cm2. Since the current density is significantly higher than in previous works, it can be assumed that the faradic component of material removal predominates the non-faradic part due to the double layer. A FEM simulation using COMSOL Multiphysics shows the dependence of the material removal rate to the concentration of Fe3+ ions. The influence of different process parameters on the etch profile and the spatial resolution is investigated in theory and in practical tests. Computational and experimental results show a removal rate of 7.5μm/As to 8.5μm/As (As=Ampere seconds) which is in accordance to the theoretical value of 7.7μm/As calculated with Faraday's first law for Fe3+ ions.
• We use a structured cathode with an integrated microfluidic channel.
• The working distance is 20μm.
• The process is simulated with COMSOL Multiphysics.
• Experiments are conducted at a current density of 100 A/cm2.
• At high current densities the effect of non-faradic components can be neglected.
Journal: International Journal of Machine Tools and Manufacture - Volume 72, September 2013, Pages 25–31