Numerical and experimental study on bi-direction deformations in laser micro forming of two-bridge actuators

Laser micro forming as an application of laser forming in micro systems has received considerable attentions in recent years. This process is a non-contact and high precision forming method. The traditional mechanical micro forming technologies for the adjustment step used in micro system assembly are often limited in their accuracy and are also time consuming. In this work, a fiber laser was used to induce bi-direction deformations of the two-bridge actuator and the forming process was simulated using a fully 3-D finite element model to illustrate the transient temperature and displacement development. Numerical studies were conducted to find out deformation behaviors of the in-plane and out-of-plane under conditions of constant peak temperature (CPT), constant laser power (CLP) and different heating positions. The calculated results agreed well with the experimental data.

► The bi-direction deformations of the two-bridge are induced in laser micro forming.
► The transient temperature and displacement development are analyzed.
► The behaviors of the in-plane and out-of-plane deformations are conducted.