کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
786272 | 1465639 | 2012 | 11 صفحه PDF | دانلود رایگان |

To examine effects of indentation size and substrate on the hardness determination of thin films, two typical types of hard film/soft substrate (Ni/Fe) and soft film/hard substrate (Al/Si and Al/glass) systems are investigated. A simple model is proposed to predict the intrinsic hardness of thin films, which allows a more accurate fitting to empirical data and the estimation of ultimate film hardness. The model can be used to interpret indentation data and extrapolate the indentation depth-hardness curve to an important region where indentation depth lies between 1% to 5 times of film thickness. The results are well consistent with the evolving trend of composite hardness obtained from experiments and numerical results by finite element analysis.
► We investigate the indentation size effect and substrate effect on the indentation measurement.
► We develop a new method for extracting the intrinsic hardness from indentation.
► Our model can fit the FEM data from the mechanism-based strain gradient plasticity very well.
Journal: International Journal of Plasticity - Volume 34, July 2012, Pages 1–11