Key Equipments for O3-based Wet-Chemical Surface Engineering and PVD Processes Tailored for High-Efficiency Silicon Heterojunction Solar Cells

SINGULUS TECHNOLOGIES AG has been dedicated to realizing multiple HJT-projects worldwide up to gigawatt dimension. In this contribution key equipments including advanced wet-chemical texturing and cleaning processes based on ozone (O3) and PVD (Physical Vapour Deposition) for ITO (Indium Tin Oxide) layers are reviewed, which are developed and optimized together with industrial and institutional partners.