کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
794029 1466775 2007 10 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Process repeatability in abrasive jet micro-machining
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی صنعتی و تولید
پیش نمایش صفحه اول مقاله
Process repeatability in abrasive jet micro-machining
چکیده انگلیسی

Abrasive jet micro-machining (AJM) is a useful process for the fabrication of channels and holes in micro-fluidic and microelectronic devices. The small scale of these features and the need to achieve a high degree of accuracy has revealed several problems inherent with traditional abrasive jet equipment. Poor repeatability of the erosion rate in a pressure feed AJM system was traced to uncontrolled variation in the abrasive particle mass flux caused by particle packing and local cavity formation in the reservoir. The introduction of a mixing device within the pressure reservoir ensured that the powder remained loose and able to flow through the orifice to the air stream. This produced a significant improvement in AJM repeatability. Additional factors affecting erosion repeatability such as particle size stratification and the effect of powder level in the reservoir were also examined.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Materials Processing Technology - Volume 190, Issues 1–3, 23 July 2007, Pages 51–60
نویسندگان
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